Glinsner, Thomas : rechercher sur Z-Library

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1

Development of nanoimprint processes for photovoltaic applications

Hauser, Hubert, Tucher, Nico, Tokai, Katharina, Schneider, Patrick, Wellens, Christine, Volk, Anne, Seitz, Sonja, Benick, Jan, Barke, Simon, Dimroth, Frank, Müller, Claas, Glinsner, Thomas, Bläsi, Ben

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 1.50 MB

english, 2015

2

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology

Lenk, Claudia, Krivoshapkina, Yana, Hofmann, Martin, Lenk, Steve, Ivanov, Tzvetan, Rangelow, Ivo W., Ahmad, Ahmad, Reum, Alexander, Holz, Mathias, Glinsner, Thomas, Eibelhuber, Martin, Treiblmayr, Dom

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 5.69 MB

english, 2019

3

Comparison of multilayer stamp concepts in UV–NIL

Ulrich Plachetka, Markus Bender, Andreas Fuchs, Thorsten Wahlbrink, Thomas Glinsner, Heinrich Kurz

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 325 KB

english, 2006

4

Chemometric evaluation of concentration profiles from compounds relevant in beer ageing

Kurt Varmuza, Ingrid Steiner, Thomas Glinsner, Helmut Klein

Journal:

European Food Research and Technology

Année:

2002

Langue:

english

Fichier:

PDF, 97 KB

english, 2002

5

Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography

Marko Vogler, Sabine Wiedenberg, Michael Mühlberger, Iris Bergmair, Thomas Glinsner, Holger Schmidt, Ernst-Bernhard Kley, Gabi Grützner

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 473 KB

english, 2007

6

Nanoimprint Lithography : The technology makes its mark on CMOS image sensors and in the nano-world

Thomas Glinsner, Gerald Kreindl, Michael Kast

Journal:

Optik & Photonik

Année:

2010

Langue:

english

Fichier:

PDF, 403 KB

english, 2010

7

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Microfluidics and BioMEMS - Microfluidic technology and polymer nanoimprinting

Islam, Rafiqul, Glinsner, Thomas, Mastrangelo, Carlos H., Becker, Holger

Année:

2001

Langue:

english

Fichier:

PDF, 159 KB

english, 2001

8

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Silanized polymeric working stamps for hot embossing lithography

Wissen, Matthias, Bogdanski, N., Jerzy, R., Berrada, Z. E., Fink, Marion, Reuther, Freimut, Glinsner, Thomas, Scheer, Hella-Christin, Mackay, R. Scott

Année:

2004

Langue:

english

Fichier:

PDF, 2.59 MB

english, 2004

9

Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

Glinsner, Thomas, Lindner, Paul, Mühlberger, Michael, Bergmair, Iris, Schöftner, Rainer, Hingerl, Kurt, Schmid, Holger, Kley, Ernst-Bernhard

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2007

Langue:

english

Fichier:

PDF, 772 KB

english, 2007

10

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Adhesive Wafer Bonding with SU-8 Intermediate Layers for Microfluidic Applications

Dragoi, Viorel, Mittendorfer, Gerald, Thanner, Christine, Matthias, Thorsten, Glinsner, Thomas, Lindner, Paul

Année:

2006

Langue:

english

Fichier:

PDF, 679 KB

english, 2006

11

Next-generation lithography: Making a good impression

Kreindl, Gerald, Glinsner, Thomas, Miller, Ron

Journal:

Nature Photonics

Année:

2010

Langue:

english

Fichier:

PDF, 286 KB

english, 2010

12

SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Nanotechnology III - Fabrication process of 3D-photonic crystals via UV-nanoimprint lithography

Glinsner, Thomas, Lindner, Paul, Mühlberger, Michael, Bergmair, Iris, Schöftner, Rainer, Hingerl, Kurt, Schmidt, Holger, Kley, Ernst-Bernhard, Briones, Fernando

Année:

2007

Langue:

english

Fichier:

PDF, 407 KB

english, 2007

13

Transition of MEMS Technology to Nanofabrication

Luesebrink, Helge, Glinsner, Thomas, Jakeway, Stephen C., Crabtree, H. John, Cameron, Neil S., Roberge, Hélène, Veres, Teodor

Journal:

Journal of Nanoscience and Nanotechnology

Année:

2005

Langue:

english

Fichier:

PDF, 456 KB

english, 2005

14

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Emerging Lithographic Technologies V - Nanoimprint lithography with a commercial 4-in. bond system for hot embossing

Roos, Nils, Luxbacher, Thomas, Glinsner, Thomas, Pfeiffer, Karl, Schulz, Hubert, Scheer, Hella-Christin, Dobisz, Elizabeth A.

Année:

2001

Langue:

english

Fichier:

PDF, 1.44 MB

english, 2001

15

[IEEE 2014 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) - Millbrae, CA, USA (2014.10.6-2014.10.9)] 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) - Monolithic IC integration key alignment aspects for high process yield

Uhrmann, Thomas, Wagenleitner, Thomas, Glinsner, Thomas, Wimplinger, Markus, Lindner, Paul

Année:

2014

Langue:

english

Fichier:

PDF, 835 KB

english, 2014

16

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Impact of vacuum environment on the hot embossing process

Roos, Nils, Wissen, Matthias, Glinsner, Thomas, Scheer, Hella-Christin, Engelstad, Roxann L.

Année:

2003

Langue:

english

Fichier:

PDF, 632 KB

english, 2003

17

SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Adhesive wafer bonding for MEMS applications

Dragoi, Viorel, Glinsner, Thomas, Mittendorfer, Gerald, Wieder, Bernhard, Lindner, Paul, Chiao, Jung-Chih, Varadan, Vijay K., Can, Carles

Année:

2003

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2003

18

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Nanostructuring of polymers by hot embossing lithography

Scheer, Hella-Christin, Mackay, R. Scott, Glinsner, Thomas, Wissen, Matthias, Pelzer, Rainer

Année:

2004

Langue:

english

Fichier:

PDF, 1.52 MB

english, 2004

19

SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] BioMEMS and Nanotechnology - Application of imprint technologies for creation of micro- and nanoscale pattern

Glinsner, Thomas, Nicolau, Dan V., Muller, Uwe R., Beutl, Michael, Dwyer, Steven, Dell, John M., Lindner, Paul, Wimplinger, Markus, Kettner, Paul, Hanna, Samy, Leising, Gunther

Année:

2003

Langue:

english

Fichier:

PDF, 934 KB

english, 2003

20

Scanning probe-based high-accuracy overlay alignment concept for lithography applications

Ishchuk, Valentyn, Guliyev, Elshad, Aydogan, Cemal, Buliev, Ivan, Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Reum, Alexander, Lenk, Steve, Lenk, Claudia, Nikolov, Nikolay, Glinsner, Thomas, Rang

Journal:

Applied Physics A: Materials Science & Processing

Année:

2017

Langue:

english

Fichier:

PDF, 10.05 MB

english, 2017